MKS introduces the elite™ RF Power Generator, a cost -effective, compact solution for photovoltaic, LED and semiconductor processing
MKS Instruments, Inc. has introduced the elite™ RF Power Generator for amorphous Si PV, LED and MEMS applications. It offers a reliable, cost-effect and easy-to-install solution for RF deposition and etch needs.
MKS introduces the elite™ RF Power Generator
A cost -effective, compact solution for photovoltaic, LED and semiconductor processing
Andover, MA, August 10, 2011 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the elite™ RF Power Generator for amorphous Si PV, LED and MEMS applications. The elite™ generator's integrated, single PCBA design offers exceptional reliability, and its air cooled, compact, light weight design provides a cost -effective, easy -to -install solution for RF deposition and etch needs.
The elite™ RF generator is available in 2U full rack and 3U half rack enclosures to allow for rack mounting, and is available in power levels of 300W, 600W and 750W. The robust, full rack design eliminates cables and connectors, while the patented inductive clamp technology protects the generator from adverse VSWR load conditions. The air -cooled, single phase, efficient 13.56 MHz generator results in low cost -of -ownership.
The elite™ RF generator can be used for amorphous thin film solar manufacturing, LED passivation and etch, MEMS and semiconductor processes including PVD, CVD, ALD, strip and etch. The elite™ generator can also be applied for cleaning, surface treatment and coating of medical components; and back end electronic packaging.
To download a photo of the elite™ RF Power Generator, please go to the MKS web site: http://www.mksinst.com/photos.
Phone: 978 -645 -5538
Fax: 978 -557 -5100
MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.