MKS introduces High Flow Valves

MKS' High Flow Valves features a high conductance design to meet high flow requirements. They are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow manufacturing applications.

MKS Instruments, Inc.

2 Tech Drive, Suite 201
Andover, MA 01810

Corporate contact:
MaryAnn Naddy
Phone: 978 -645 -5538
Fax: 978 -557 -5100

MKS introduces High Flow Valves
High Conductance, Durable Design Meets High Performance Requirements

Andover, MA, June 23, 2010 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced High Flow Valves, featuring a high conductance design that meets high flow requirements where reliable isolation is needed. HFV valves are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications. HFVs have a smaller profile, and are lighter, lower in cost, and easier to maintain than similar valves on the market. Produced using the latest manufacturing techniques and highest quality materials, the HFVs are extremely durable and dependable. Lifetime can extend to 1,000,000 cycles for all sizes, greatly increasing system uptime.

Edge -welded bellows prevent out -gassing and virtual leaks, and maximize stroke length to maintain high conductance. To accommodate any footprint requirement, the HFV valve can be mounted vertically or horizontally without effect to its isolating seal performance. HFV valves also can be completely disassembled in the field, resulting in lower replacement parts costs and easier maintenance.

HFV valves feature a 304 stainless steel vacuum grade, fusion welded, beaded blasted body that resists corrosion and has fewer entrapment areas for high purity. They can be heated to 185C to prevent process byproducts from condensing in the valve. To accommodate different process temperatures and composition requirements, a variety of elastomer seals are available, including Viton®, Chemraz®, Kalrez®, and Perlast®. HFV valves are available in sizes NW160 (6ʺ), NW200 (8ʺ), NW250 (10ʺ), and NW320 (12ʺ).

Note to editors: To download a photo of the High Flow Valves, please go to the MKS web site:

About MKS:
MKS Instruments, Inc. is a leading, global provider of technologies to power, control, deliver, monitor, measure and analyze advanced processes in high growth markets. Our primary served markets are manufacturers of capital equipment for thin film applications including semiconductor devices, flat panel displays, light emitting diodes (LEDs), solar cells, data storage media and coatings, as well as medical equipment; energy generation and environmental monitoring processes; biopharm and other industrial manufacturing; and university, government and industrial research laboratories.

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